6 February 2007 Core-shell diamond-like silicon photonic crystals from 3D polymer templates created by holographic lithography
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Abstract
Diamond-like silicon photonic crystals were fabricated by sequential chemical vapor deposition of silica and silicon on polymer templates photopatterned by holographic lithography. The optical properties of the 3D crystals after each processing step were measured and compared to the corresponding bandgap simulation. The core-shell morphology formed during CVD process is approximated using two level surfaces.
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Jun Hyuk Moon, Jun Hyuk Moon, Yongan Xu, Yongan Xu, Wenting Dong, Wenting Dong, Seung-Man Yang, Seung-Man Yang, Joseph W. Perry, Joseph W. Perry, Ali Adibi, Ali Adibi, Shu Yang, Shu Yang, } "Core-shell diamond-like silicon photonic crystals from 3D polymer templates created by holographic lithography", Proc. SPIE 6480, Photonic Crystal Materials and Devices VI, 64800P (6 February 2007); doi: 10.1117/12.701168; https://doi.org/10.1117/12.701168
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