13 February 2007 Statistical analysis and yield management in LED design through TCAD device simulation
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Abstract
This paper illustrates how technology computer-aided design (TCAD), which nowadays is an essential part of CMOS technology, can be applied to LED development and manufacturing. In the first part, the essential electrical and optical models inherent to LED modeling are reviewed. The second part of the work describes a methodology to improve the efficiency of the simulation procedure by using the concept of process compact models (PCMs). The last part demonstrates the capabilities of PCMs using an example of a blue InGaN LED. In particular, a parameter screening is performed to find the most important parameters, an optimization task incorporating the robustness of the design is carried out, and finally the impact of manufacturing tolerances on yield is investigated. It is indicated how the concept of PCMs can contribute to an efficient design for manufacturing DFM-aware development.
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Gergö Létay, Gergö Létay, Wei-Choon Ng, Wei-Choon Ng, Lutz Schneider, Lutz Schneider, Adrian Bregy, Adrian Bregy, Michael Pfeiffer, Michael Pfeiffer, } "Statistical analysis and yield management in LED design through TCAD device simulation", Proc. SPIE 6486, Light-Emitting Diodes: Research, Manufacturing, and Applications XI, 64860U (13 February 2007); doi: 10.1117/12.698850; https://doi.org/10.1117/12.698850
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