21 February 2007 Development of fully depleted scientific CCDs for astronomy
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Abstract
Due to aggressive scientific specifications, Semiconductor Technology Associates and the University of Arizona's Imaging Technology Laboratory have collaborated to develop a fully depleted back illuminated CCD for scientific imaging. These devices are designed to target increased quantum efficiency into the near-infrared, without reduction in the modulation transfer function, charge transfer efficiency, or rms noise. The STA1700 series imagers are back illuminated 100 micron thick devices with a 10 micron pixel pitch targeted to meet the requirements of the Large Synoptic Survey Telescope (LSST). Recent characterization results will be presented including the point spread function of a 2 micron spot. Also discussed will be the thinning and packaging developments for the STA1700. These efforts include the addition of a backside bias contact, invar package design with high density connectors, as well as etching and backside coating optimization for high resistivity silicon.
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Kasey Boggs, Kasey Boggs, Richard Bredthauer, Richard Bredthauer, Michael Lesser, Michael Lesser, } "Development of fully depleted scientific CCDs for astronomy", Proc. SPIE 6501, Sensors, Cameras, and Systems for Scientific/Industrial Applications VIII, 650106 (21 February 2007); doi: 10.1117/12.698409; https://doi.org/10.1117/12.698409
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