21 March 2007 Characterization of various Sn targets with respect to debris and fast ion generation
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Abstract
We evaluated Sn debris generated from a CO2 laser (10.um) and a Nd:YAG laser (1064nm) plasma. Experiments were performed with bulk Sn-plates (t=1mm) and freestanding Sn-foils (t=15um). Quartz Crystal Microbalances (QCM) were used for debris analysis. We observed a drastically lower deposition for the CO2 laser driven plasma compared with the Nd:YAG laser plasma. In addition, several Sn coated targets with different Sn thickness were investigated for the CO2 drive laser with respect to the generated plasma debris. In general, a 100nm Sn coated glass target generated more debris than the solid Sn target. Especially, we observed for the Sn-plate target that the deposition rate is smaller than the erosion (sputter) rate caused by the plasma ions.
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Yoshifumi Ueno, Hideo Hoshino, Tatsuya Ariga, Taisuke Miura, Masaki Nakano, Hiroshi Komori, Georg Soumagne, Akira Endo, Hakaru Mizoguchi, Akira Sumitani, Koichi Toyoda, "Characterization of various Sn targets with respect to debris and fast ion generation", Proc. SPIE 6517, Emerging Lithographic Technologies XI, 65173B (21 March 2007); doi: 10.1117/12.711226; https://doi.org/10.1117/12.711226
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