21 March 2007 Characterization of various Sn targets with respect to debris and fast ion generation
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Abstract
We evaluated Sn debris generated from a CO2 laser (10.um) and a Nd:YAG laser (1064nm) plasma. Experiments were performed with bulk Sn-plates (t=1mm) and freestanding Sn-foils (t=15um). Quartz Crystal Microbalances (QCM) were used for debris analysis. We observed a drastically lower deposition for the CO2 laser driven plasma compared with the Nd:YAG laser plasma. In addition, several Sn coated targets with different Sn thickness were investigated for the CO2 drive laser with respect to the generated plasma debris. In general, a 100nm Sn coated glass target generated more debris than the solid Sn target. Especially, we observed for the Sn-plate target that the deposition rate is smaller than the erosion (sputter) rate caused by the plasma ions.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yoshifumi Ueno, Yoshifumi Ueno, Hideo Hoshino, Hideo Hoshino, Tatsuya Ariga, Tatsuya Ariga, Taisuke Miura, Taisuke Miura, Masaki Nakano, Masaki Nakano, Hiroshi Komori, Hiroshi Komori, Georg Soumagne, Georg Soumagne, Akira Endo, Akira Endo, Hakaru Mizoguchi, Hakaru Mizoguchi, Akira Sumitani, Akira Sumitani, Koichi Toyoda, Koichi Toyoda, } "Characterization of various Sn targets with respect to debris and fast ion generation", Proc. SPIE 6517, Emerging Lithographic Technologies XI, 65173B (21 March 2007); doi: 10.1117/12.711226; https://doi.org/10.1117/12.711226
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