21 March 2007 Debris characteristics from a colloidal microjet target containing tin dioxide nano-particles
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Abstract
Characteristics of suprathermal ions and neutral particles from a laser-produced tin plasma by use of a colloidal microjet target containing tin dioxide (SnO2) nanoparticles were investigated. Suprathermal ion emissions were reduced by producing a low-density preplasma. Simultaneously, the maximum conversion efficiency of 1.2% at 13.5 nm with a bandwidth of 2% and a solid angle of 2&pgr; sr was observed. Neutral particles, however, were not suppressed under the optimum laser-plasma conditions.
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Takeshi Higashiguchi, Sumihiro Suetake, Yusuke Senba, Yusuke Sato, Akira Hosotani, Yukari Takahashi, Shoichi Kubodera, "Debris characteristics from a colloidal microjet target containing tin dioxide nano-particles", Proc. SPIE 6517, Emerging Lithographic Technologies XI, 65173D (21 March 2007); doi: 10.1117/12.711983; https://doi.org/10.1117/12.711983
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