Application of perturbation methods in optical scatterometry

B. C. Bergner; T. J. Suleski

doi:10.1117/12.712291

5 April 2007 Application of perturbation methods in optical scatterometry

B. C. Bergner, T. J. Suleski

Author Affiliations +

Proceedings Volume 6518, Metrology, Inspection, and Process Control for Microlithography XXI; 651829 (2007) https://doi.org/10.1117/12.712291
Event: SPIE Advanced Lithography, 2007, San Jose, California, United States

Abstract

Optical scattering techniques can provide rapid, non-destructive measurements of nanometer-scale structures for micro-fabrication process control. In general, these techniques compare measured optical characteristics of a sample to results generated from a theoretical model. The models can be computationally expensive, especially when used with iterative methods to obtain a solution to the inverse problem. However, the structures of interest are normally restricted to small changes from some nominal structure. Perturbation theories have been used to efficiently calculate the effects of small changes on the performance of photonic crystals. In this paper, we apply these perturbation techniques to the optical scatterometry problem and demonstrate a calculation of the change in the scattered signal due to edge roughness from an array of holes in a dielectric.

Citation Download Citation

B. C. Bergner and T. J. Suleski "Application of perturbation methods in optical scatterometry", Proc. SPIE 6518, Metrology, Inspection, and Process Control for Microlithography XXI, 651829 (5 April 2007); https://doi.org/10.1117/12.712291

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE