A new SEM CD operator verified against Monte Carlo simulations

C. G. Frase; D. Gnieser; K. Dirscherl; E. Buhr; H. Bosse

doi:10.1117/12.712503

5 April 2007 A new SEM CD operator verified against Monte Carlo simulations

C. G. Frase, D. Gnieser, K. Dirscherl, E. Buhr, H. Bosse

Proceedings Volume 6518, Metrology, Inspection, and Process Control for Microlithography XXI; 65184P (2007) https://doi.org/10.1117/12.712503
Event: SPIE Advanced Lithography, 2007, San Jose, California, United States

Abstract

A new algorithm for SEM CD evaluation of trapezoidal line structures is presented. It is based on the physical modeling of SEM image formation and allows the assignment of top and bottom structural edge positions to the SEM signal. The SEM image profile is described by a set of piecewise continuous functions which is convoluted with the electron probe intensity profile. The resulting function is fitted to the measured signal profile by a least squares algorithm. The fit returns both top and bottom edge positions as well as the electron probe diameter. The algorithm is verified against three different Monte Carlo simulation programs using different physical models of elastic and inelastic electron scattering and secondary electron generation and transport. The effect of the physical modeling on the evaluated critical dimension is discussed and the absolute CD deviation of the algorithm is determined for different sets of specimen and tool parameters like edge slope angle, beam energy, and electron probe diameter.

Citation Download Citation

C. G. Frase, D. Gnieser, K. Dirscherl, E. Buhr, and H. Bosse "A new SEM CD operator verified against Monte Carlo simulations", Proc. SPIE 6518, Metrology, Inspection, and Process Control for Microlithography XXI, 65184P (5 April 2007); https://doi.org/10.1117/12.712503

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available