Contact angles and structure/surface property relationships of immersion materials

Linda K. Sundberg; Daniel P. Sanders; Ratnam Sooriyakumaran; Phillip J. Brock; Robert D. Allen

doi:10.1117/12.712632

2 April 2007 Contact angles and structure/surface property relationships of immersion materials

Linda K. Sundberg, Daniel P. Sanders, Ratnam Sooriyakumaran, Phillip J. Brock, Robert D. Allen

Proceedings Volume 6519, Advances in Resist Materials and Processing Technology XXIV; 65191Q (2007) https://doi.org/10.1117/12.712632
Event: SPIE Advanced Lithography, 2007, San Jose, California, United States

Abstract

Surface properties of materials are an important, even vital, consideration in immersion lithography. Many investigations have shown that sessile drop static contact angles are not entirely useful in the design of high performance immersion lithography surfaces. We have synthesized and characterized a broad family of "hydrophobic" materials and this paper will share information on the role of molecular structure on contact angles and hysteresis of these immersion materials. Insight into the relationship between structure and contact angles for future immersion materials will be presented.

Citation Download Citation

Linda K. Sundberg, Daniel P. Sanders, Ratnam Sooriyakumaran, Phillip J. Brock, and Robert D. Allen "Contact angles and structure/surface property relationships of immersion materials", Proc. SPIE 6519, Advances in Resist Materials and Processing Technology XXIV, 65191Q (2 April 2007); https://doi.org/10.1117/12.712632

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