Effect of deprotection activation energy on lithographic performance of EUVL resist

Sang-Jeoung Kim; Geun-Jong Yu; Jung-Yeol Lee; Hyun-Jin Kim; Jae-Woo Lee; Deog-Bae Kim; Yool Kang; Jaehyun Kim

doi:10.1117/12.711951

23 March 2007 Effect of deprotection activation energy on lithographic performance of EUVL resist

Sang-Jeoung Kim, Geun-Jong Yu, Jung-Yeol Lee, Hyun-Jin Kim, Jae-Woo Lee, Deog-Bae Kim, Yool Kang, Jaehyun Kim

Proceedings Volume 6519, Advances in Resist Materials and Processing Technology XXIV; 651947 (2007) https://doi.org/10.1117/12.711951
Event: SPIE Advanced Lithography, 2007, San Jose, California, United States

Abstract

As the feature size becomes smaller, it is difficult for the lithography progress to keep pace with the acceleration of design rule shrinkage and high integration of memory device. Extreme Ultra Violet Lithography (EUVL) is a preferred solution for the 32nm node. In this paper, we have synthesized two types of polymers. One is based on hydroxy phenol, the other is based on hydrocarbon acrylate type polymer. We have diversified each polymer type according to different activation energies for deprotection reaction. In this experiment, we have observed on the resist lithographic performance such as resolution, LER (Line Edge Roughness), photo-sensitivity, and out-gassing during exposure. Different properties according to activation energy were well explained by acid diffusion and polymer free-volume.

Citation Download Citation

Sang-Jeoung Kim, Geun-Jong Yu, Jung-Yeol Lee, Hyun-Jin Kim, Jae-Woo Lee, Deog-Bae Kim, Yool Kang, and Jaehyun Kim "Effect of deprotection activation energy on lithographic performance of EUVL resist", Proc. SPIE 6519, Advances in Resist Materials and Processing Technology XXIV, 651947 (23 March 2007); https://doi.org/10.1117/12.711951

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available