Effects Of Dispersion On The Determination Of Optical Constants Of Thin Films

C K. Carniglia

doi:10.1117/12.938373

13 October 1986 Effects Of Dispersion On The Determination Of Optical Constants Of Thin Films

C K. Carniglia

Proceedings Volume 0652, Thin Film Technologies II; (1986) https://doi.org/10.1117/12.938373
Event: 1986 International Symposium/Innsbruck, 1986, Innsbruck, Austria

Abstract

The optical constants n and k for a weakly absorbing thin film material can be determined from the transmission scan of a single thick layer of the material coated on a substrate. The envelope method makes use of the wavelengths and transmittance values of the maxima and minima of a spectral scan to determine the optical constants. The values and positions of these extrema are affected by the dispersion of the optical constants. The dispersion of the index affects the position of the odd quarterwave extrema, but not the halfwave extrema. The effect is small (typically 0.5%) for high index oxide materials. The dispersion in the extinction coefficient causes larger errors, especially near the absorption edge where the extrema can be shifted by several percent. The effects of the dispersion are calculated and the results are used to obtain more accurate values of the optical constants and thickness of the film. The various errors and the resulting corrections to the optical constants are compared for a typical high index oxide film.

Citation Download Citation

C K. Carniglia "Effects Of Dispersion On The Determination Of Optical Constants Of Thin Films", Proc. SPIE 0652, Thin Film Technologies II, (13 October 1986); https://doi.org/10.1117/12.938373

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