Canon has renewed its platform of exposure tools. The new platform, the FPA-7000, is designed to cover multiple
generations. The lens performance of the FPA-7000AS5 achieves less than 6m&lgr;, while that of the AS7 is estimated to
be less than 4m&lgr;. The illumination performance meets the target required for the 45nm node. The in-situ aberration
monitor, called iPMI, attains the measurement repeatability of 1.45m&lgr;. Focus and overlay units have improved process
robustness. A solution tool for optimization is introduced to be connected with the FPA-7000. Moreover, latest studies
of immersion, such as nozzle pressure, temperature control and defect inspection result are reported, and we also
discuss the possibility of high-refractive-index immersion.