A solid-state 193-nm laser with high spatial coherence for sub-40-nm interferometric immersion lithography

Andrew J. Merriam; Donald S. Bethune; John A. Hoffnagle; William D. Hinsberg; C. Michael Jefferson; James J. Jacob; Timothy Litvin

doi:10.1117/12.712210

26 March 2007 A solid-state 193-nm laser with high spatial coherence for sub-40-nm interferometric immersion lithography

Andrew J. Merriam, Donald S. Bethune, John A. Hoffnagle, William D. Hinsberg, C. Michael Jefferson, James J. Jacob, Timothy Litvin

Author Affiliations +

Proceedings Volume 6520, Optical Microlithography XX; 65202Z (2007) https://doi.org/10.1117/12.712210
Event: SPIE Advanced Lithography, 2007, San Jose, California, United States

Abstract

We have developed a solid-state 193-nm laser source operating at 5-kHz that generates a near-diffraction-limited TEM₀₀ beam with 35 mW average power. The frequency spectrum is Gaussian, with a linewidth ~7-pm (FWHM), corresponding to a coherence length of ~2-mm. The output beam also has a very high degree of spatial coherence. This source was used in an interferometric liquid-immersion lithography test stand to produce 40- and 35-nm half-pitch grating structures over a ~0.6-mm field of view with a commercially available chemically-amplified photoresist.

Citation Download Citation

Andrew J. Merriam, Donald S. Bethune, John A. Hoffnagle, William D. Hinsberg, C. Michael Jefferson, James J. Jacob, and Timothy Litvin "A solid-state 193-nm laser with high spatial coherence for sub-40-nm interferometric immersion lithography", Proc. SPIE 6520, Optical Microlithography XX, 65202Z (26 March 2007); https://doi.org/10.1117/12.712210

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available