Reliable high-power injection locked 6kHz 60W laser for ArF immersion lithography

Hidenori Watanabe; Shigeo Komae; Satoshi Tanaka; Ryoichi Nohdomi; Taku Yamazaki; Hiroaki Nakarai; Junichi Fujimoto; Takashi Matsunaga; Takashi Saito; Kouji Kakizaki; Hakaru Mizoguchi

doi:10.1117/12.711258

27 March 2007 Reliable high-power injection locked 6kHz 60W laser for ArF immersion lithography

Hidenori Watanabe, Shigeo Komae, Satoshi Tanaka, Ryoichi Nohdomi, Taku Yamazaki, Hiroaki Nakarai, Junichi Fujimoto, Takashi Matsunaga, Takashi Saito, Kouji Kakizaki, Hakaru Mizoguchi

Author Affiliations +

Proceedings Volume 6520, Optical Microlithography XX; 652031 (2007) https://doi.org/10.1117/12.711258
Event: SPIE Advanced Lithography, 2007, San Jose, California, United States

Abstract

Reliable high power 193nm ArF light source is desired for the successive growth of ArF-immersion technology for 45nm node generation. In 2006, Gigaphoton released GT60A, high power injection locked 6kHz/60W/0.5pm (E95) laser system, to meet the demands of semiconductor markets. In this paper, we report key technologies for reliable mass production GT laser systems and GT60A high durability performance test results up to 20 billion pulses.

Citation Download Citation

Hidenori Watanabe, Shigeo Komae, Satoshi Tanaka, Ryoichi Nohdomi, Taku Yamazaki, Hiroaki Nakarai, Junichi Fujimoto, Takashi Matsunaga, Takashi Saito, Kouji Kakizaki, and Hakaru Mizoguchi "Reliable high-power injection locked 6kHz 60W laser for ArF immersion lithography", Proc. SPIE 6520, Optical Microlithography XX, 652031 (27 March 2007); https://doi.org/10.1117/12.711258

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