Translator Disclaimer
30 April 2007 Uncertainty analysis of mircoresonator using classical and interval methods
Author Affiliations +
Abstract
This paper presents an uncertainty analysis of micro electro mechanical systems using analytical methods and interval analysis. Laterally driven polysilicon resonant micro structure is considered to illustrate the analysis.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
B. Vasuki, M. Umapathy, G. Uma, M. Shanmugavalli, and S. Meenatchisundaram "Uncertainty analysis of mircoresonator using classical and interval methods", Proc. SPIE 6528, Nanosensors, Microsensors, and Biosensors and Systems 2007, 652812 (30 April 2007); https://doi.org/10.1117/12.716054
PROCEEDINGS
4 PAGES


SHARE
Advertisement
Advertisement
Back to Top