11 April 2007 On the size-dependent behavior of the micro-wire in the micro-tensile test
Author Affiliations +
Micro-wires have used widely in microelectronic devices. In order to support the high performance of microsystems, it is important to measure the mechanical properties of the micro-wires. In this study, we measured the mechanical properties of micro-wire to investigate the size effect behavior experimentally. Specimens used in this study are platinum micro-wires that have various diameters such as 15, 25, 40, 50, 125, 200, and 250 &mgr;m. The platinum micro-wires with the purity of 99.99 % were annealed to remove the residual stress. We carried out the tensile test to measure the mechanical properties using the nanoUTM and TYTRON 250. Many researches in micro scale structures have shown that the deformation is dependent on the size of specimen as well as grain size. To evaluate the size effect, we focused on the relation between the strength and the specimen diameter. Our result shows that the strength of the specimen changes as its diameter changes. We are trying to investigate micro-structure of the specimen such as grain boundary to explain this size-dependent behavior.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Seonghyun Ko, Seonghyun Ko, Bongbu Jung, Bongbu Jung, Hunkee Lee, Hunkee Lee, Hyunchul Park, Hyunchul Park, } "On the size-dependent behavior of the micro-wire in the micro-tensile test", Proc. SPIE 6528, Nanosensors, Microsensors, and Biosensors and Systems 2007, 65281M (11 April 2007); doi: 10.1117/12.720751; https://doi.org/10.1117/12.720751


Designing MEMS for manufacturing
Proceedings of SPIE (October 24 2004)
SOI micromachining technologies for MEMS
Proceedings of SPIE (August 24 2000)
Wafer level reliability
Proceedings of SPIE (January 13 1993)

Back to Top