11 April 2007 Design and fabrication of OTFT based flexible piezoelectric sensor
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Abstract
Design and fabrication of Organic Thin Film Transistor (OTFT) based miniaturized piezoelectric sensor is presented in this investigation. The device is fabricated on flexible polyethylene naphthalate (PEN) film, using the small-molecule hydrocarbon pentacene as the semiconductor layer and solution-processed polyvinylphenol as the gate dielectric. Field effect mobility of the OTFT is greater than 0.01 cm2/Vs, Ion/Ioff current ratio greater than 105. The piezoelectric polymer, Polyvinylidene Fluoride (PVDF) is used as the sensor layer that is attached over the extended gate metal electrode of the OTFT. OTFT, which is in close proximity with sensor, serves as the amplifier to amplify the signal generated by piezoelectric sensor.
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Taeksoo Ji, Taeksoo Ji, Mayakuthan Kathiresan, Mayakuthan Kathiresan, Shiny Nair, Shiny Nair, Soyoun Jung, Soyoun Jung, Venkatachalam Natarajan, Venkatachalam Natarajan, Rama Mohan Rao Vishnubhatla, Rama Mohan Rao Vishnubhatla, Vijay K. Varadan, Vijay K. Varadan, } "Design and fabrication of OTFT based flexible piezoelectric sensor", Proc. SPIE 6528, Nanosensors, Microsensors, and Biosensors and Systems 2007, 65281P (11 April 2007); doi: 10.1117/12.735864; https://doi.org/10.1117/12.735864
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