Intelligent fault detection and diagnosis (FDD) depends on smart sensors which not only can render sensory
information but also can make easy the subsequent detection and diagnosis. At the heart of every intelligent
FDD system, there are sensors which work collaboratively with one another as well as the intelligent system.
Miniaturized sensors present unique advantages in facilitating the installation of sensory devices for the purpose
of diagnosis. In this paper, we present ongoing research on intelligent FDD and characterization using
miniaturized sensor. With miniaturization, sensors can be readily made and integrated into intelligent diagnosis.
Characterization and modeling of such innovative sensor designs are presented. Using new smart multi-function,
telemetric, and integrated sensors as "intelligent nodes" in systems will provide necessary sensory information
(for example, an integrated sensor which measures pressure, flow, and temperature--all in one module). The
characterization and studies of miniaturized sensor are presented, with practical relevance to applications. The
concept of intelligent nodes is further augmented with wireless sensors and system integration.