6 April 2007 Fabrication and evaluation of a LPFG-based whitelight interferometric distance sensor
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Abstract
Optical fiber whitelight interferometers for distance measurement have attracted a lot of attention recently because they offer absolute measurement, ultrahigh accuracy, large dynamic range, and robustness. In this paper, the development of an in-fiber whitelight interferometric distance sensor based on the mode coupling effect of a long period fiber grating (LPFG) is presented. Unlike the Fabry-Perot interferometric (FPI) distance sensor that has a minimum requirement on the measurable distance, the LPFG-based distance sensor can measure a distance that is as small as several nanometers. Therefore, it can be applied for near-field surface profiling of micro/nano-sized components. The principle of operation of the LPFG-based distance sensor is first explained and an innovative micro-photolithographic technique to fabricate the sensor probe is described in detail. The performance of the distance sensors using two different types of LPFGs, laser-machined LPFG and mechanically induced LPFG, were evaluated and the experimental results are presented.
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Haiying Huang, Ayan Majumdar, "Fabrication and evaluation of a LPFG-based whitelight interferometric distance sensor", Proc. SPIE 6529, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2007, 65290Z (6 April 2007); doi: 10.1117/12.715440; https://doi.org/10.1117/12.715440
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