4 May 2007 Low cost MEMS hydrophones
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Abstract
A new approach for microelectromechanical systems (MEMS) hydrophones is discussed, which yields miniature, low power, and high performance hydrophones. The prototype devices use a laser interferometer with integrated low power electronics built on conventional silicon on sapphire (SOS) complimentary metal oxide semiconductor (CMOS) technology to optically detect pressure waves. Results show sensitivities of -143 dBV re 1 μPa, comparable to or better than piezoelectric, capacitive condenser, or other optical approaches. The implication is to make very low cost hydrophones while drastically reducing the power and computational requirements. This is viewed as a disruptive technology for areas such as coastal defense and port security where cost, size and power consumption is key.
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Keith J. Rebello, David A. Kitchin, Robert F. Henrick, Francisco Tejada, "Low cost MEMS hydrophones", Proc. SPIE 6540, Optics and Photonics in Global Homeland Security III, 65400W (4 May 2007); doi: 10.1117/12.720149; https://doi.org/10.1117/12.720149
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