Paper
2 May 2007 Spectral characterization of diffractively structured GaAs using the ARISTMS
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Abstract
Spectral results including reflectance, transmittance, rTIS, and tTIS are presented for diffractively structured GaAs using the Automated Rasterable Integrated Spectrometric and Total Integrated Scatter Measurement System (ARISTMS). The data is for the bandwidth of 10&mgr;m to 12&mgr;m over a range of incidence angles between 0° to 75°. A description of the diffractively structured GaAs and the operation of the ARISTMS are given.
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Phil Coulter and Michael Wilson "Spectral characterization of diffractively structured GaAs using the ARISTMS", Proc. SPIE 6545, Window and Dome Technologies and Materials X, 654505 (2 May 2007); https://doi.org/10.1117/12.720419
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KEYWORDS
Gallium arsenide

Transmittance

Reflectivity

Photomasks

Photoresist materials

Data modeling

Scatter measurement

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