3 May 2007 Complex MEMS device: microshutter array system for space applications
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Abstract
A complex MEMS device, microshutter array system, is being developed at NASA Goddard Space Flight Center for use as an aperture array for a Near-Infrared Spectrometer (NirSpec). The instrument will be carried on the James Webb Space Telescope (JWST), the next generation of space telescope after Hubble Space Telescope retires. The microshutter arrays (MSAs) are designed for the selective transmission of light with high efficiency and high contrast. Arrays are close-packed silicon nitride membranes with a pixel size close to 100x200 &mgr;m. Individual shutters are patterned with a torsion flexure permitting shutters to open 90 degrees with a minimized mechanical stress concentration. Light shields are made on to each shutter for light leak prevention so to enhance optical contrast. Shutters are actuated magnetically, latched and addressed electrostatically. The shutter arrays are fabricated using MEMS bulk-micromachining technologies and packaged using single-sided indium flip-chip bonding technology. The MSA flight concept consists of a mosaic of 2 x 2 format of four fully addressable 365 x 171 arrays placed in the JWST optical path at the focal plane.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mary J. Li, Mary J. Li, Tomoko Adachi, Tomoko Adachi, Christine Allen, Christine Allen, Sachi Babu, Sachi Babu, Sateesh Bajikar, Sateesh Bajikar, Michael Beamesderfer, Michael Beamesderfer, Ruth Bradley, Ruth Bradley, Kevin Denis, Kevin Denis, Nick Costen, Nick Costen, Audrey Ewin, Audrey Ewin, Dave Franz, Dave Franz, Larry Hess, Larry Hess, Ron Hu, Ron Hu, Kamili Jackson, Kamili Jackson, Murzy Jhabvala, Murzy Jhabvala, Dan Kelly, Dan Kelly, Todd King, Todd King, Gunther Kletetschka, Gunther Kletetschka, Alexander Kutyrev, Alexander Kutyrev, Barney Lynch, Barney Lynch, Timothy Miller, Timothy Miller, Harvey Moseley, Harvey Moseley, Vilem Mikula, Vilem Mikula, Brent Mott, Brent Mott, Lance Oh, Lance Oh, James Pontius, James Pontius, Dave Rapchun, Dave Rapchun, Chris Ray, Chris Ray, Knute Ray, Knute Ray, Eric Schulte, Eric Schulte, Scott Schwinger, Scott Schwinger, Peter Shu, Peter Shu, Robert Silverberg, Robert Silverberg, Wayne Smith, Wayne Smith, Steve Snodgrass, Steve Snodgrass, David Sohl, David Sohl, Leroy Sparr, Leroy Sparr, Rosalind Steptoe-Jackson, Rosalind Steptoe-Jackson, Veronica Valeriano, Veronica Valeriano, Liqin Wang, Liqin Wang, Yun Zheng, Yun Zheng, Chris Zincke, Chris Zincke, } "Complex MEMS device: microshutter array system for space applications", Proc. SPIE 6556, Micro (MEMS) and Nanotechnologies for Defense and Security, 655602 (3 May 2007); doi: 10.1117/12.721502; https://doi.org/10.1117/12.721502
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