10 May 2007 Optically addressed spring-patterned membrane mirror MEMS with megahertz response
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In this paper, the fabrication, modeling and characterization of an all optically addressed spring patterned silicon-nitride deformable mirror Micro-Electro-Mechanical-System (MEMS) device is reported. This device is biased through combinations of high frequency AC and DC voltages. The experimentally verified theoretical modeling for this device shows mirror deflection saturation as a function of light intensity appropriate for dynamic range compression deconvolution. It was experimentally verified that the spring MEMS deformable mirror device has response up to 10 MHz, which opens the possibility of correcting supersonic turbulence as well as atmospheric turbulence.
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Bahareh Haji-saeed, Bahareh Haji-saeed, Gregory Griffith, Gregory Griffith, Sandip K. Sengupta, Sandip K. Sengupta, William D. Goodhue, William D. Goodhue, Jed Khoury, Jed Khoury, Charles L. Woods, Charles L. Woods, John Kierstead, John Kierstead, } "Optically addressed spring-patterned membrane mirror MEMS with megahertz response", Proc. SPIE 6556, Micro (MEMS) and Nanotechnologies for Defense and Security, 65560C (10 May 2007); doi: 10.1117/12.719630; https://doi.org/10.1117/12.719630

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