3 May 2007 Investigation of the conducting polymer microsensors generated using an intermediate-layer lithography method
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Abstract
Conducting polymers have received much attention since their discovery in 1977. Applications of conducting polymer microsystems span from electronic devices to sensors. Traditional sensors had one-to-one correspondence between the detector and the target. Multiple conducting polymer micropattern arrays on a common substrate, when used for sensing, can effectively broaden the scope of a sensor. The Intermediate-layer lithography (ILL) technique was developed to generate multiple conducting polymer micropatterns, of desired dimensions on a common substrate. In this method, the sizes of the micropatterns can be scaled down effectively. Compared to films, micropatterns exhibited higher sensitivity at lower analyte concentrations. Also, the response of film sensors was not accurate when the conducting polymer film was partially covered, indicating that rare concentrations of analytes would be difficult to detect using the conventional conducting polymer film sensors. In the current work, conducting polymer micropatterns of varying dimensions have been fabricated using the ILL method and tested for their responses to organic vapors at low concentrations. The relationship between the surface-to-volume ratios of the micropatterns and their corresponding sensitivities is found for various target concentrations. The research results would provide insights regarding optimization of the micropattern sensors for maximizing their sensitivities.
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Anirban Chakraborty, Anirban Chakraborty, Ganga Parthasarathi, Ganga Parthasarathi, Cheng Luo, Cheng Luo, } "Investigation of the conducting polymer microsensors generated using an intermediate-layer lithography method", Proc. SPIE 6556, Micro (MEMS) and Nanotechnologies for Defense and Security, 65560Y (3 May 2007); doi: 10.1117/12.721163; https://doi.org/10.1117/12.721163
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