Generation of silicon nanowires using a new thinning and trimming method

Hui Wang; Anirban Chakraborty; Xinchuan Liu; Hao Li; Cheng Luo

doi:10.1117/12.721230

3 May 2007 Generation of silicon nanowires using a new thinning and trimming method

Hui Wang, Anirban Chakraborty, Xinchuan Liu, Hao Li, Cheng Luo

Proceedings Volume 6556, Micro (MEMS) and Nanotechnologies for Defense and Security; 65561P (2007) https://doi.org/10.1117/12.721230
Event: Defense and Security Symposium, 2007, Orlando, Florida, United States

Abstract

A new thinning and trimming approach has been explored to produce silicon nanowires (SiNWs) from silicon microwires. One-dimensional nanostructures have attracted great attention recently because of their potential applications as excellent components in micro/nanodevices. SiNWs in particular have received much attention since silicon is the most widely used material in integrated-circuit and microfabrication processes and has unique mechanical and electrical properties. However, due to the shortcomings of the existing fabrication approaches, new methods are needed to produce SiNWs that can not only be massively fabricated but also batch integrated to functional devices. The developed thinning and trimming approach is believed to be such a method, and would permit precise control of the structure, size and positions of SiNWs. Furthermore, this method may be used to break through the limitation of lithography in the sense that silicon features fabricated by any lithographic methods can be further miniaturized using this approach. Our progress on developing this new thinning and trimming approach is detailed in this paper.

Citation Download Citation

Hui Wang, Anirban Chakraborty, Xinchuan Liu, Hao Li, and Cheng Luo "Generation of silicon nanowires using a new thinning and trimming method", Proc. SPIE 6556, Micro (MEMS) and Nanotechnologies for Defense and Security, 65561P (3 May 2007); https://doi.org/10.1117/12.721230

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available