23 May 2007 Noncontact no-moving parts surface height measurement sensor using liquid crystal-based axial scanning confocal optical microscopy
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Abstract
An analog liquid crystal lens-based axial scanning confocal microscope is demonstrated as a 48 &mgr;m continuous range optical height measurement sensor used to characterize a 2.3 &mgr;m height Indium Phosphide twin square optical waveguide chip.
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Nabeel A. Riza, Nabeel A. Riza, Sajjad A. Khan, Sajjad A. Khan, Mumtaz Sheikh, Mumtaz Sheikh, } "Noncontact no-moving parts surface height measurement sensor using liquid crystal-based axial scanning confocal optical microscopy", Proc. SPIE 6572, Enabling Photonics Technologies for Defense, Security, and Aerospace Applications III, 65720Q (23 May 2007); doi: 10.1117/12.717834; https://doi.org/10.1117/12.717834
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