16 May 2007 Fabrication and test of an integrated optical sensor with high sensitivity and high dynamic range based on a Mach-Zehnder interferometric configuration
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Abstract
Integrated optics (IO) technology has been primarily used in optical communication applications but it is expanding fast into the field of optical sensing. In this work we report the fabrication of integrated devices using hybrid sol-gel technology and in particular its application in the fabrication of a refractive index integrated sensor based in a Mach-Zehnder interferometric configuration. In one of the interferometer arms, a analysis chamber is created by exposing the waveguide through the removal of the device cladding. On the same arm, two Bragg gratings with the same period are fabricated: one in the unprotected waveguide area and another in close proximity (cladded area); because of the different effective index in the two grating regions, two peaks are observed in reflection if the device is tested with a broadband source. Any change of the refractive index of the material filling the analysis chamber can be detected in two ways: by measuring the intensity of the interferometric output (at a wavelength different from the Bragg wavelength of the two gratings) or by measuring the spectrum of the reflected signal. The high sensitivity is obtained by measuring the interferometric output, while the high dynamic range can be achieved by measuring the reflected signal from the grating structures.
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D. Alexandre, J. Viegas, L. Fernandes, P. J. Moreira, A.M.P. Leite, J. L. Santos, P.V.S. Marques, "Fabrication and test of an integrated optical sensor with high sensitivity and high dynamic range based on a Mach-Zehnder interferometric configuration", Proc. SPIE 6585, Optical Sensing Technology and Applications, 65850L (16 May 2007); doi: 10.1117/12.722764; https://doi.org/10.1117/12.722764
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