Quantitative modelization of particle emission from excited solids: application to spectroscopic diagnostics of buried interfaces in multilayer

Nicola Mahne; Angelo Giglia; Stefano Nannarone; Juri Bertoli; Valentina Mattarello; Valentino Rigato

doi:10.1117/12.722922

18 May 2007 Quantitative modelization of particle emission from excited solids: application to spectroscopic diagnostics of buried interfaces in multilayer

Nicola Mahne, Angelo Giglia, Stefano Nannarone, Juri Bertoli, Valentina Mattarello, Valentino Rigato

Author Affiliations +

Proceedings Volume 6586, Damage to VUV, EUV, and X-ray Optics; 65860V (2007) https://doi.org/10.1117/12.722922
Event: International Congress on Optics and Optoelectronics, 2007, Prague, Czech Republic

Abstract

The performance of multilayer optics depends on the quality of interfaces between spacer and absorber materials. Intermixing at the interfaces affects the optical behavior. An experimental method is presented here to obtain the amount of intermixing at the buried interfaces of multilayer structures. The method is based on the combined use of photoemission and a rocking scan through the Bragg peak. The possibility of obtaining quantitative information - through a phenomenological model - on the width of the intermixing region is presented and discussed.

Citation Download Citation

Nicola Mahne, Angelo Giglia, Stefano Nannarone, Juri Bertoli, Valentina Mattarello, and Valentino Rigato "Quantitative modelization of particle emission from excited solids: application to spectroscopic diagnostics of buried interfaces in multilayer", Proc. SPIE 6586, Damage to VUV, EUV, and X-ray Optics, 65860V (18 May 2007); https://doi.org/10.1117/12.722922

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