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18 May 2007 Quantitative modelization of particle emission from excited solids: application to spectroscopic diagnostics of buried interfaces in multilayer
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Abstract
The performance of multilayer optics depends on the quality of interfaces between spacer and absorber materials. Intermixing at the interfaces affects the optical behavior. An experimental method is presented here to obtain the amount of intermixing at the buried interfaces of multilayer structures. The method is based on the combined use of photoemission and a rocking scan through the Bragg peak. The possibility of obtaining quantitative information - through a phenomenological model - on the width of the intermixing region is presented and discussed.
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Nicola Mahne, Angelo Giglia, Stefano Nannarone, Juri Bertoli, Valentina Mattarello, and Valentino Rigato "Quantitative modelization of particle emission from excited solids: application to spectroscopic diagnostics of buried interfaces in multilayer", Proc. SPIE 6586, Damage to VUV, EUV, and X-ray Optics, 65860V (18 May 2007); https://doi.org/10.1117/12.722922
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