15 May 2007 LTCC: a fascinating technology platform for miniaturized devices
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Abstract
Recently, miniaturized devices and microstructures made from Low Temperature Cofired Ceramics (LTCC) are gaining increasing interest due to advantages especially on the field of a simplified wiring approach. This is in particular true when applications are targeted for theses devices where harsh environmental conditions are present, such as high temperatures, aggressive media or high system-related pressure levels. In this paper an overview is given on some selected devices for automotive and airborne applications designed for such challenging system constraints. For an enhanced performance of these miniaturized sensor elements, basic investigations are performed on the novel use of thin film metallization on LTCC substrates which are basically designed for thick film technology.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
U. Schmid, U. Schmid, } "LTCC: a fascinating technology platform for miniaturized devices", Proc. SPIE 6589, Smart Sensors, Actuators, and MEMS III, 65890B (15 May 2007); doi: 10.1117/12.722793; https://doi.org/10.1117/12.722793
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