Development of MEMS-based liquid chromatography modules for agrofood applications

Antonella Benvenuto; Leandro Lorenzelli; Cristian Collini; Vittorio Guarnieri; Andrea Adami; Elisa Morganti

doi:10.1117/12.721936

15 May 2007 Development of MEMS-based liquid chromatography modules for agrofood applications

Antonella Benvenuto, Leandro Lorenzelli, Cristian Collini, Vittorio Guarnieri, Andrea Adami, Elisa Morganti

Proceedings Volume 6589, Smart Sensors, Actuators, and MEMS III; 65890D (2007) https://doi.org/10.1117/12.721936
Event: Microtechnologies for the New Millennium, 2007, Maspalomas, Gran Canaria, Spain

Abstract

This work presents the realization of a MEMS-based miniaturized system for liquid chromatography focused on agrofood applications, and in particular on the detection of wine defects. The main modules of the systems are: i.) a Si-based separation column with inlet/outlet for fluidic connections; ii.) a three-microelectrode voltammetric sensor. Moreover, a Platinum heater has been realized on the back side of the chip containing the Si column in order to operate at temperatures greater than the room temperature. The realized device consists of a Silicon/Pyrex structure realised by anodic bonding. Microchannels and inlet/outlet have been fabricated by Deep Reactive Ion Etching (DRIE) and Tetra Methyl Ammonium Hydroxide (TMAH) wet etching respectively. The column has been functionalised with n-octyltriethoxysilane (C8-TEOS). A lift-off technique has been developed for realizing the Pt heater and the Pt microelectrodes on-chip. In order to separately characterize the main modules of the device, a package of the system has been realized following a modular approach; appropriate tubing and nanovolume connections have been used in order to minimize dead volumes. Then other packages approaches have been considered in order to minimize dead volumes and to avoid leakage issues. Preliminary characterization tests of the two main modules have been performed. The capability of the system to correctly retain and detect Acetic acid has been tested.

Citation Download Citation

Antonella Benvenuto, Leandro Lorenzelli, Cristian Collini, Vittorio Guarnieri, Andrea Adami, and Elisa Morganti "Development of MEMS-based liquid chromatography modules for agrofood applications", Proc. SPIE 6589, Smart Sensors, Actuators, and MEMS III, 65890D (15 May 2007); https://doi.org/10.1117/12.721936

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