A tuning fork gyroscope with compensated imbalance signal

E. Arnold; F. Nuscheler

doi:10.1117/12.724085

17 May 2007 A tuning fork gyroscope with compensated imbalance signal

E. Arnold, F. Nuscheler

Proceedings Volume 6589, Smart Sensors, Actuators, and MEMS III; 65890I (2007) https://doi.org/10.1117/12.724085
Event: Microtechnologies for the New Millennium, 2007, Maspalomas, Gran Canaria, Spain

Abstract

This paper is presenting a robust gyroscope sensor with an electrical and mechanical self-test option and the ability to suppress the quadrature error. The presented sensor is based on a tuning-fork working principle. The mechanical part is assembled in bulk-technology produced with a wet etching process. The two detection elements are manufactured with a standard CMOS-process and the material of the two thin-film actuators is AlN (aluminium-nitrid). The two actuators can be controlled independently from each other. Two electronic PCB's were developed for actuating and measurement. One is including the analogue signal path; the second PCB is the digital electronics consisting of a FPGA and other peripherals. The tuning fork is actuated in a primary oscillation mode also called drive mode. For keeping the oscillation in resonance, a digital PLL is used in a forced feedback loop. To have a constant energy in the drive mode an Amplitude-Gain-Control (AGC) is implemented. An appearing angular rate causes the corriolis-force which is actuating secondary oscillation, also called detection mode. The amplitude of this oscillation is proportional to the angular rate. The signal has a component resulting from the mechanical imbalance. To separate these two signal parts from each other a synchronous demodulator followed by a digital filter chain has been developed. To achieve the maximum suppression of the imbalance signal a control-loop is used to shift the phases of the two actuation signals. This creates an additional force that compensates the movement as a result of the mechanical imbalance. With the implementation of this control loop the performance of the sensor was increased. An enhanced temperature stability over operation was achieved with the means of this compensation.

Citation Download Citation

E. Arnold and F. Nuscheler "A tuning fork gyroscope with compensated imbalance signal", Proc. SPIE 6589, Smart Sensors, Actuators, and MEMS III, 65890I (17 May 2007); https://doi.org/10.1117/12.724085

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available