31 May 2007 Searching for hypothetical forces in the Casimir regime using a MEMS based force sensor
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A microelectromechanical torsional oscillator was used to obtain new constraints in the search for new Yukawa-like interactions at the ~ 100 nm range. A new heterodyne technique was used to enhance the possible contributions of hypothetical forces, while electromagnetic interactions (including the ones associated with vacuum fluctuations), remained the same. In particular, the force between a Au-coated sphere and a Au film deposited on the oscillator was subtracted in situ from the force between the same sphere and a composite film made out of Ge and Au. The combination of the high quality factor Q of the oscillator and this new approach that greatly reduced the Casimir background yielded improvements in the constraints close to one order of magnitude over the 50-400 nm interaction range.
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Ricardo S. Decca, Ricardo S. Decca, Daniel López, Daniel López, Dennis E. Krause, Dennis E. Krause, Ephraim Fischbach, Ephraim Fischbach, } "Searching for hypothetical forces in the Casimir regime using a MEMS based force sensor", Proc. SPIE 6589, Smart Sensors, Actuators, and MEMS III, 65890K (31 May 2007); doi: 10.1117/12.724221; https://doi.org/10.1117/12.724221

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