Inductively coupled MEMS-based micro RFID transponder

Hong M. Lu; Chuck Goldsmith; Jeong-Bong Lee

doi:10.1117/12.722096

15 May 2007 Inductively coupled MEMS-based micro RFID transponder

Hong M. Lu, Chuck Goldsmith, Jeong-Bong Lee

Proceedings Volume 6589, Smart Sensors, Actuators, and MEMS III; 65890W (2007) https://doi.org/10.1117/12.722096
Event: Microtechnologies for the New Millennium, 2007, Maspalomas, Gran Canaria, Spain

Abstract

In this paper, we present the design, fabrication and characterization of an inductively-coupled miniaturized RFID transponder using MEMS technology. The micromachined miniaturized transponder consists of a small solenoid inductor with a high permeability magnetic core, a chip capacitor and a RFID chip. They are integrated onto a micromachined SU-8 polymer substrate and it is operated in the frequency range of 13.56 to 27 MHz. Induced voltages of up to 4 V were obtained with a miniaturized 500 nH transponder coil from a 2.2 μH reader coil at 5 mm distance based on a resonant magnetic coupling mechanism. The assembled transponder was tested using a commercial RFID reader at 13.56 MHz and successful communication was established at a distance of 10 mm.

Citation Download Citation

Hong M. Lu, Chuck Goldsmith, and Jeong-Bong Lee "Inductively coupled MEMS-based micro RFID transponder", Proc. SPIE 6589, Smart Sensors, Actuators, and MEMS III, 65890W (15 May 2007); https://doi.org/10.1117/12.722096

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