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15 May 2007 A metal-to-metal contact RF MEMS switch towards handsets applications
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Proceedings Volume 6589, Smart Sensors, Actuators, and MEMS III; 65890Y (2007) https://doi.org/10.1117/12.721582
Event: Microtechnologies for the New Millennium, 2007, Maspalomas, Gran Canaria, Spain
Abstract
A MEMS switch for radio frequency applications has been designed, fabricated, and characterized. The focus has been in the optimization of switch performance towards handset applications. The realized switch has actuation voltage less than 15 V for realizing a good metal-to-metal contact. Measured results show loss less than 0.25 dB up to 10 GHz with matching better than -30 dB in the down-state, and isolation better than -20 dB up to 6 GHz in the up-state.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tauno Vähä-Heikkilä and Pekka Rantakari "A metal-to-metal contact RF MEMS switch towards handsets applications", Proc. SPIE 6589, Smart Sensors, Actuators, and MEMS III, 65890Y (15 May 2007); https://doi.org/10.1117/12.721582
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