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15 May 2007 DLC/TiNi microcage for biopsy applications
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Proceedings Volume 6589, Smart Sensors, Actuators, and MEMS III; 65891C (2007)
Event: Microtechnologies for the New Millennium, 2007, Maspalomas, Gran Canaria, Spain
A TiNi/diamond-like-carbon (DLC) microcage for biological application has been designed, fabricated and characterized. A compressively stressed DLC film with TiNi pattern on top lifts the fingers upwards once they are released from the substrate, and the microcage can be closed through shape memory effect of top TiNi film with temperature below 80°C. Further heating above 100°C, the gradual opening of the microcage can be obtained due to thermal bimorph effect. The biocompatibility of both the TiNi and DLC films has been proved using a cell-culture method.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Y. Q. Fu, J. K. Luo, S. Ong, S. Zhang, A. J. Flewitt, and W. I. Milne "DLC/TiNi microcage for biopsy applications", Proc. SPIE 6589, Smart Sensors, Actuators, and MEMS III, 65891C (15 May 2007);


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