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15 May 2007 SMA micro actuators for active shape control, handling technologies, and medical applications
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The shape memory effect is about to become more and more important as an innovative actuation principle in micro system technologies. Shape memory alloys (SMA) are able to return into a pre-memorized shape when heated. Due to this regeneration force and actuation is produced. This publication reports on the design and the functionality of SMA micro actuators and their applications for active shape control, handling technologies and medical engineering. Thin NiTi foils have been chosen because of their well defined properties and high strength. In order to integrate them into micro systems, different manufacturing methods have been applied and improved at the Institute for Microtechnology (IMT). Laser cutting and wet chemical etching for example are used to fabricate actuator elements for several applications. Different methods for electrical and mechanical connections of the actuators are employed, for example soldering by the use of an additional gold layer. A batch fabrication process of SMA actuators is realized by embedding NiTi-elements into SU-8 structures. Three different micro actuator concepts are presented: A multi-actuator system for deformation of elastic surfaces, which is driven by numerous identical single actuators connected in parallel and in series, a micro gripper for handling and assembling of complex hybrid micro systems and a micro actuator system in medical tools for percutaneous resection of aortic valves.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. Leester-Schädel, B. Hoxhold, S. Demming, and S. Büttgenbach "SMA micro actuators for active shape control, handling technologies, and medical applications", Proc. SPIE 6589, Smart Sensors, Actuators, and MEMS III, 65891D (15 May 2007);

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