31 May 2007 Research in micro-nanotechnology and systems: a European perspective. Opportunities in framework programme 7: 2007-2013
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Abstract
The Research European Programmes have paid attention to the area of microsystems since the early 90's when the Research was focused on Micro-Electro-Mechanical Systems. Since then the interest has grown into an area of Microsystems and Micro Nano Technology for a wide set of applications in which the multidiscipline and the convergence of technologies play an important role. Systems combining sensing, processing and actuating are increasingly complex involving different disciplines and integrating different technologies, and making the field of Microsystems technology expands to the field of 'Smart Integrated Systems'. Today the attention is focused in the increasing complexity and miniaturization of the systems, networking capabilities and autonomy. The recently launched 7th Framework Programme and the coordination of national or regional research initiatives will help to realise the research agenda for this strategic field for Europe. This paper will give some results of ongoing initiatives, some visions and an outlook for the future with focus in micro and nanosytems.
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I. Vergara, I. Vergara, G. Van Caenegem, G. Van Caenegem, F. Ibáñez, F. Ibáñez, } "Research in micro-nanotechnology and systems: a European perspective. Opportunities in framework programme 7: 2007-2013", Proc. SPIE 6591, Nanotechnology III, 659102 (31 May 2007); doi: 10.1117/12.740799; https://doi.org/10.1117/12.740799
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