22 May 2007 Drilled dielectric membranes for highly resonant filtering in the infrared
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Abstract
Subwavelength dielectric and metallic gratings embedded in vacuum can act as highly-resonant spectral filters. We review the theoretical principles for the design of symmetric dielectric and metal gratings to conceive efficient optical filters in the mid and far infrared range, and we show how both resonance width and resonance wavelength can be tuned. We describe an original process for the fabrication of free-standing SiC gratings, and we present the first samples obtained with 10 &mgr;m period. Experimental angularly resolved transmission spectra show evidences of their filtering properties.
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G. Vincent, C. Billaudeau, S. Collin, R. Haïdar, A. Madouri, D. Chouteau, M. Laroche, N. Guérineau, F. Pardo, J.-L. Pelouard, "Drilled dielectric membranes for highly resonant filtering in the infrared", Proc. SPIE 6591, Nanotechnology III, 659107 (22 May 2007); doi: 10.1117/12.722045; https://doi.org/10.1117/12.722045
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