22 May 2007 Drilled dielectric membranes for highly resonant filtering in the infrared
Author Affiliations +
Proceedings Volume 6591, Nanotechnology III; 659107 (2007); doi: 10.1117/12.722045
Event: Microtechnologies for the New Millennium, 2007, Maspalomas, Gran Canaria, Spain
Subwavelength dielectric and metallic gratings embedded in vacuum can act as highly-resonant spectral filters. We review the theoretical principles for the design of symmetric dielectric and metal gratings to conceive efficient optical filters in the mid and far infrared range, and we show how both resonance width and resonance wavelength can be tuned. We describe an original process for the fabrication of free-standing SiC gratings, and we present the first samples obtained with 10 &mgr;m period. Experimental angularly resolved transmission spectra show evidences of their filtering properties.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
G. Vincent, C. Billaudeau, S. Collin, R. Haïdar, A. Madouri, D. Chouteau, M. Laroche, N. Guérineau, F. Pardo, J.-L. Pelouard, "Drilled dielectric membranes for highly resonant filtering in the infrared", Proc. SPIE 6591, Nanotechnology III, 659107 (22 May 2007); doi: 10.1117/12.722045; https://doi.org/10.1117/12.722045


Dielectric filters

Dielectric polarization

Optical filters

Infrared radiation


Silicon carbide

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