Drilled dielectric membranes for highly resonant filtering in the infrared

G. Vincent; C. Billaudeau; S. Collin; R. Haïdar; A. Madouri; D. Chouteau; M. Laroche; N. Guérineau; F. Pardo; J.-L. Pelouard

doi:10.1117/12.722045

22 May 2007 Drilled dielectric membranes for highly resonant filtering in the infrared

G. Vincent, C. Billaudeau, S. Collin, R. Haïdar, A. Madouri, D. Chouteau, M. Laroche, N. Guérineau, F. Pardo, J.-L. Pelouard

Author Affiliations +

Proceedings Volume 6591, Nanotechnology III; 659107 (2007) https://doi.org/10.1117/12.722045
Event: Microtechnologies for the New Millennium, 2007, Maspalomas, Gran Canaria, Spain

Abstract

Subwavelength dielectric and metallic gratings embedded in vacuum can act as highly-resonant spectral filters. We review the theoretical principles for the design of symmetric dielectric and metal gratings to conceive efficient optical filters in the mid and far infrared range, and we show how both resonance width and resonance wavelength can be tuned. We describe an original process for the fabrication of free-standing SiC gratings, and we present the first samples obtained with 10 &mgr;m period. Experimental angularly resolved transmission spectra show evidences of their filtering properties.

Citation Download Citation

G. Vincent, C. Billaudeau, S. Collin, R. Haïdar, A. Madouri, D. Chouteau, M. Laroche, N. Guérineau, F. Pardo, and J.-L. Pelouard "Drilled dielectric membranes for highly resonant filtering in the infrared", Proc. SPIE 6591, Nanotechnology III, 659107 (22 May 2007); https://doi.org/10.1117/12.722045

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available