Synthesis of diamond-like carbon films by pulsed laser deposition in a tiny vacuum chamber

Jaanus Eskusson; Raivo Jaaniso; Tea Avarmaa; Taavi Jantson; Enn Lust

doi:10.1117/12.721808

16 May 2007 Synthesis of diamond-like carbon films by pulsed laser deposition in a tiny vacuum chamber

Jaanus Eskusson, Raivo Jaaniso, Tea Avarmaa, Taavi Jantson, Enn Lust

Proceedings Volume 6591, Nanotechnology III; 65910L (2007) https://doi.org/10.1117/12.721808
Event: Microtechnologies for the New Millennium, 2007, Maspalomas, Gran Canaria, Spain

Abstract

Diamond like-carbon films were fabricated by pulsed laser ablation of a liquid target (vacuum oil) in a very small (volume below 1 cm³) vacuum chamber, where the film was deposited onto the inner surface of the chamber window. The synthesis was carried out at room temperature using 248 nm KrF excimer laser. The sp³ hybridization carbon formation was additionally promoted by gaseous H₂O₂ flow through the reaction chamber. Deposited diamond-like carbon films were characterized by Raman scattering spectroscopy, optical and atomic force microscopy. The results indicated that higher sp³ content was present in the film areas exposed to the laser irradiation during the deposition. The surface roughness of these areas was lower compared with that of the non-irradiated areas. Optical microscopy observations indicated that the films had interference-colored regions on laser irradiated areas. These colored regions were significantly different from their surroundings, which were grey or brown. Thus, the interferencecolored regions have very wide band gap (&Dgr;E > 3 eV) and accordingly, high sp³ hybridized carbon content.

Citation Download Citation

Jaanus Eskusson, Raivo Jaaniso, Tea Avarmaa, Taavi Jantson, and Enn Lust "Synthesis of diamond-like carbon films by pulsed laser deposition in a tiny vacuum chamber", Proc. SPIE 6591, Nanotechnology III, 65910L (16 May 2007); https://doi.org/10.1117/12.721808

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