12 June 2007 Ultrasensitive nanomechanical photonic microsensor
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Abstract
A novel ultrasensitive integrated nanomechanical optical sensor is proposed and analyzed. The photonic device consists of a silicon nitride disk resonator formed by a horizontal slot-waveguide acting as a circular cantilever. The device sensitivity results from the product of the sensitivities of the slot-waveguide and the disk resonator. A deflection sensitivity of 11.5 nm-1 is predicted, representing an enhancement of 4 orders of magnitude as compared to state-of-the-art microcantilever sensors.
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Carlos Angulo Barrios, Carlos Angulo Barrios, } "Ultrasensitive nanomechanical photonic microsensor", Proc. SPIE 6593, Photonic Materials, Devices, and Applications II, 65930X (12 June 2007); doi: 10.1117/12.723390; https://doi.org/10.1117/12.723390
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