A new type of dynamic infrared image modulator based on the MEMS technique

Fangkui Sun; Chunfei Li; Wei Jiang; Shoutao Zhang; Di Wu; Yingxue Shi

doi:10.1117/12.725719

5 March 2007 A new type of dynamic infrared image modulator based on the MEMS technique

Fangkui Sun, Chunfei Li, Wei Jiang, Shoutao Zhang, Di Wu, Yingxue Shi

Proceedings Volume 6595, Fundamental Problems of Optoelectronics and Microelectronics III; 659510 (2007) https://doi.org/10.1117/12.725719
Event: Fundamental Problems of Optoelectronics and Microelectronics III, 2006, Harbin, China

Abstract

In this paper, we have proposed a new type of DIRIM with suspended membrane resistor (SMR) structure, while mainly focusing on its implementation technology which includes selection of resistance material and fabrication technique of the membrane; design of Read-In-Integrated-Circuit; and implementation of silica-base MEMS process. Some performance parameters of the device are quoted to conclude the advantages of this new type of DIRIM and make an outlook on the key development in the future.

Citation Download Citation

Fangkui Sun, Chunfei Li, Wei Jiang, Shoutao Zhang, Di Wu, and Yingxue Shi "A new type of dynamic infrared image modulator based on the MEMS technique", Proc. SPIE 6595, Fundamental Problems of Optoelectronics and Microelectronics III, 659510 (5 March 2007); https://doi.org/10.1117/12.725719

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