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5 March 2007 Theoretical analysis of multiprobe confocal 3-D detection system
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Proceedings Volume 6595, Fundamental Problems of Optoelectronics and Microelectronics III; 659526 (2007) https://doi.org/10.1117/12.726451
Event: Fundamental Problems of Optoelectronics and Microelectronics III, 2006, Harbin, China
Abstract
To solve the problem of slow speed in single point scanning confocal measurement, a new way to make 3-D morphology confocal detection by optical fiber beam is presented. In the new system, with the point light source produced by optical fiber array and light intensity information detected by pinhole array, the synchronous scanning of the measured surface is done. Compared to the multi-probe detection system of lens array, the new system has the characteristics of simple structure and low price. Based on the general confocal principle and with Fourier optics theory, the 3-D point spread function of a simple fiber pinhole pair is got. With the matrix operating form, the imaging characteristic of the multi-probe measurement system is analyzed. Meanwhile, the conclusion of theoretical analysis shows the total light distribution of the multi-probe detection system conforms to the multiplication form of each detection light path.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hai-yan Li and Zhao-bang Pu "Theoretical analysis of multiprobe confocal 3-D detection system", Proc. SPIE 6595, Fundamental Problems of Optoelectronics and Microelectronics III, 659526 (5 March 2007); https://doi.org/10.1117/12.726451
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