Optical properties of the undoped and SiOx doped DLC films

Šarūnas Meškinis; Vitoldas Kopustinskas; Kęstutis Šlapikas; Rimas Gudaitis; Sigitas Tamulevičius; Gediminas Niaura; Veronika Rinnerbauer; Kurt Hingerl

doi:10.1117/12.726556

25 January 2007 Optical properties of the undoped and SiO_x doped DLC films

Šarūnas Meškinis, Vitoldas Kopustinskas, Kęstutis Šlapikas, Rimas Gudaitis, Sigitas Tamulevičius, Gediminas Niaura, Veronika Rinnerbauer, Kurt Hingerl

Author Affiliations +

Proceedings Volume 6596, Advanced Optical Materials, Technologies, and Devices; 65961L (2007) https://doi.org/10.1117/12.726556
Event: Advanced Optical Materials, Technologies, and Devices, 2006, Vilnius, Lithuania

Abstract

In present study DLC films were deposited by direct ion beam deposition. Hexamethyldisiloxane vapor and hydrogen gas mixture, mixture of the hexamethyldisiloxane with acetylene as well as acetylene gas alone has been used as a source of the hydrocarbons. Optical properties of the synthesized films were investigated by spectroscopic ellipsometry. Structure of the DLC films has been studied by means of the Raman spectroscopy. Effects of the technological deposition parameters such as composition of the gas precursors, ion beam energy, ion beam current density were considered.

Citation Download Citation

Šarūnas Meškinis, Vitoldas Kopustinskas, Kęstutis Šlapikas, Rimas Gudaitis, Sigitas Tamulevičius, Gediminas Niaura, Veronika Rinnerbauer, and Kurt Hingerl "Optical properties of the undoped and SiO_x doped DLC films", Proc. SPIE 6596, Advanced Optical Materials, Technologies, and Devices, 65961L (25 January 2007); https://doi.org/10.1117/12.726556

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available