25 January 2007 Optical properties of the undoped and SiOx doped DLC films
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Proceedings Volume 6596, Advanced Optical Materials, Technologies, and Devices; 65961L (2007) https://doi.org/10.1117/12.726556
Event: Advanced Optical Materials, Technologies, and Devices, 2006, Vilnius, Lithuania
Abstract
In present study DLC films were deposited by direct ion beam deposition. Hexamethyldisiloxane vapor and hydrogen gas mixture, mixture of the hexamethyldisiloxane with acetylene as well as acetylene gas alone has been used as a source of the hydrocarbons. Optical properties of the synthesized films were investigated by spectroscopic ellipsometry. Structure of the DLC films has been studied by means of the Raman spectroscopy. Effects of the technological deposition parameters such as composition of the gas precursors, ion beam energy, ion beam current density were considered.
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Šarūnas Meškinis, Šarūnas Meškinis, Vitoldas Kopustinskas, Vitoldas Kopustinskas, Kęstutis Šlapikas, Kęstutis Šlapikas, Rimas Gudaitis, Rimas Gudaitis, Sigitas Tamulevičius, Sigitas Tamulevičius, Gediminas Niaura, Gediminas Niaura, Veronika Rinnerbauer, Veronika Rinnerbauer, Kurt Hingerl, Kurt Hingerl, } "Optical properties of the undoped and SiOx doped DLC films", Proc. SPIE 6596, Advanced Optical Materials, Technologies, and Devices, 65961L (25 January 2007); doi: 10.1117/12.726556; https://doi.org/10.1117/12.726556
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