Thin films of NdFeB deposited by PLD technique

C. Constantinescu; N. Scarisoreanu; A. Moldovan; M. Dinescu; M. Miron; L. Petrescu

doi:10.1117/12.729509

25 April 2007 Thin films of NdFeB deposited by PLD technique

C. Constantinescu, N. Scarisoreanu, A. Moldovan, M. Dinescu, M. Miron, L. Petrescu

Author Affiliations +

Proceedings Volume 6606, Advanced Laser Technologies 2006; 660619 (2007) https://doi.org/10.1117/12.729509
Event: Advanced Laser Technologies 2006, 2006, Brasov, Romania

Abstract

Neodymium-Iron-Boron (NdFeB) is a material with important magnetic properties, mostly used in permanent magnet fabrication. Thin layers of NdFeB are needed for miniaturization in electrical engineering, electronics, and for high-tech devices. We applied pulsed lased deposition (PLD) and radio frequency plasma assisted pulsed lased deposition (RFPLD) in vacuum for obtaining thin films and nanostructures of NdFeB from stoichiometric targets, at different temperatures. The influence of the laser parameters (wavelengths and fluence), radio-frequency discharge power and substrate temperature on the NdFeB structures, composition and magnetic properties has been investigated. The obtained structures have been characterized by Auger electron spectroscopy (AES), Atomic Force Microscopy (AFM) and optical microscopy. Vibrating Sample Magnetometer (VSM) studies have been performed for specific magnetic characterization.

Citation Download Citation

C. Constantinescu, N. Scarisoreanu, A. Moldovan, M. Dinescu, M. Miron, and L. Petrescu "Thin films of NdFeB deposited by PLD technique", Proc. SPIE 6606, Advanced Laser Technologies 2006, 660619 (25 April 2007); https://doi.org/10.1117/12.729509

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