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15 May 2007 The impact of scanner model vectorization on optical proximity correction
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Proceedings Volume 6607, Photomask and Next-Generation Lithography Mask Technology XIV; 66071L (2007) https://doi.org/10.1117/12.728968
Event: Photomask and Next-Generation Lithography Mask Technology XIV, 2007, Yokohama, Japan
Abstract
Low pass filtering taking place in the projection tools used by IC industry leads to a range of optical proximity effects resulting in undesired IC characteristics. To correct these predicable OPEs, EDA industry developed various, model-based correction methodologies. Of course, the success of this mission is strongly dependent on how complete the imaging models are. To represent the image formation and to capture the OPEs, the EDA community adopted various models based on simplified representations of the projection tools. Resulting optical proximity correction models are capable of correcting OPEs driven by the fundamental imaging conditions such as wavelength, illuminator layout, reticle technology, and lens numerical aperture, to name a few. It is well known in the photolithography community that OPEs are dependent on the scanner characteristics. Therefore, to reach the level of accuracy required by the leading edge IC designs, photolithography simulation has to include systematic scanner fingerprint data. These tool fingerprints capture excursions of the imaging tools from the ideal imaging setup conditions. They quantify the performance of key projection tool components such as illuminator and lens signatures. To address the imaging accuracy requirements, the scanner engineering and the EDA communities developed OPC models capable of correcting for imaging tools engineering attributes captured by the imaging tools fingerprints. Deployment of immersion imaging systems has presented the photolithography community with new opportunities and challenges. These advanced scanners, designed to image in deep sub-wavelength regime, incorporate features invoking the optical phenomena previously unexplored in commercial scanners. Most notably, the state of the art scanners incorporate illuminators with high degree of polarization control and projection lenses with hyper-NAs. The image formation in these advanced projectors exploits a wide range of vectorial interactions originating at the illuminator, on the pattern mask, in the projection lens and at the wafer. The presence of these, previously subdued phenomena requires that the imaging simulation methodologies be refined, increasing the complexity of the OPE models and optical proximity correction methodologies.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jacek K. Tyminski, Tashiharu Nakashima, Qiaolin Zhang, Tomoyuki Matsuyama, and Kevin Lucas "The impact of scanner model vectorization on optical proximity correction", Proc. SPIE 6607, Photomask and Next-Generation Lithography Mask Technology XIV, 66071L (15 May 2007); https://doi.org/10.1117/12.728968
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