The paper presents silica films of the refractive index 1.267-1.420 and silica-titania films of high refractive index 1.762.
Basic fabrication technology was presented as well as the applied measurement methods of refractive index and thickness.
The paper provides examples for the application of the elaborated technology for the fabrication of waveguide films,
input/output grating couplers and channel RIB waveguides.
"Sol-gel derived Si02:Ti02 films for applications in optoelectronics", Proc. SPIE 6608, Lightguides and Their Applications III, 66080W (9 April 2007); doi: 10.1117/12.739572; https://doi.org/10.1117/12.739572