12 April 2007 Some factors that affect the surface measurement accuracy of a low-coherence interference microscope
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Proceedings Volume 6609, 15th Czech-Polish-Slovak Conference on Wave and Quantum Aspects of Contemporary Optics; 660913 (2007) https://doi.org/10.1117/12.739688
Event: 15th Czech-Polish-Slovak Conference on Wave and Quantum Aspects of Contemporary Optics, 2006, Liberec, Czech Republic
Abstract
Low-coherence interference microscopy (LCIM) is a powerful imaging high-accuracy technique for surface inspection and profiling. The principle of this technique is based on the interference of two waves with the use of incoherent light, usually of halogen lamp or superluminescent diode. One of its principal advantages is that both the image intensity and the image phase may be extracted from the output signal. The image phase may be converted subsequently into the surface height data. The image intensity is depth discriminated in a similar way as in the confocal microscopy. A limited lateral resolving power of the microscope significantly influences the accuracy of profiling with LCIM. This factor affects not only the image intensity of the reconstructed signal, but also behaviour of the image phase. It could result in an error in surface-height data measurement, especially if the structure contains details, the size of which is comparable with the resolving power of the microscope. This paper deals with the deviation of measurement of one-dimensional and two-dimensional periodic surface structures in relation to the numerical aperture of the objective lens and to the spectral composition of the illumination. The calculations are based on the polychromatic coherent transfer function, which describes the influence of temporal and spatial coherence of illumination on the imaging characteristics of the LCIM. Experiments were done with the reflected-light low-coherence holographic microscope.
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Luděk Lovicar, Radim Chmelík, Jiří Komrska, Veronika Matoušková, Pavel Kolman, Zdeněk Foret, "Some factors that affect the surface measurement accuracy of a low-coherence interference microscope", Proc. SPIE 6609, 15th Czech-Polish-Slovak Conference on Wave and Quantum Aspects of Contemporary Optics, 660913 (12 April 2007); doi: 10.1117/12.739688; https://doi.org/10.1117/12.739688
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