Transmission Grating Incorporated Displacement Sensor: A Critical Study Of The Sensor Parameters

K. Hane; C. P. Grover

doi:10.1117/12.938631

25 November 1986 Transmission Grating Incorporated Displacement Sensor: A Critical Study Of The Sensor Parameters

K. Hane, C. P. Grover

Proceedings Volume 0661, Optical Testing and Metrology; (1986) https://doi.org/10.1117/12.938631
Event: 1986 Quebec Symposium, 1986, Quebec City, Canada

Abstract

The imaging phenomenon due to a rectangular transmission grating has earlier been described in its close vicinity. By reversing the conjugate planes, it has been possible to obtain highly magnified grating images. The phenomenon has been successfully utilized for sensing displacements of the object grating. We have observed the image magnification in the range 102 to 103 by using a 25μm object grating. The optimum imaging conditions have been explained on the basis of the OTF theory. The signal contrast has been studied theoretically and experimentally as a function of the size and polychromaticity of the light source and the distance between the object and pupil gratings. In the case of two rectangular transmission gratings, the signal consists of a triangular wave when the image is observed at infinity under the optimum imaging conditions. As the image plane approaches the pupil grating, the waveform tends to become sinusoidal due to the loss of higher spatial frequencies. We have employed the differential detection method and the sensitivity in the linear region has been estimated to be 0.01μm.

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K. Hane and C. P. Grover "Transmission Grating Incorporated Displacement Sensor: A Critical Study Of The Sensor Parameters", Proc. SPIE 0661, Optical Testing and Metrology, (25 November 1986); https://doi.org/10.1117/12.938631

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